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High-mobility poly-Si thin-film transistors fabricated by a novel excimer laser crystallization method

✍ Scribed by Shimizu, K.; Sugiura, O.; Matsumura, M.

Book ID: 114535442
Publisher: IEEE
Year: 1993
Tongue: English
Weight: 767 KB
Volume: 40
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.249432

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