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High rate deposition of amorphous hydrogenated carbon films by hollow cathode arc PECVD

✍ Scribed by Burkhard Zimmermann; Fred Fietzke; Heidrun Klostermann; Jan Lehmann; Frans Munnik; Wolfhard Möller

Book ID: 119374182
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 602 KB
Volume: 212
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2012.09.020

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