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Thermal stability of amorphous hard carbon films produced by cathodic arc deposition

✍ Scribed by Anders, Simone; DÄ±Ìaz, Javier; Ager, Joel W.; Yu Lo, Roger; Bogy, David B.

Book ID: 121308446
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 313 KB
Volume: 71
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.120339

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