Hardness, elastic modulus, and structure of very hard carbon films produced by cathodic-arc deposition with substrate pulse biasing

✍ Scribed by Pharr, George M.; Callahan, Daniel L.; McAdams, Shaun D.; Tsui, Ting Y.; Anders, Simone; Anders, André; Ager, Joel W.; Brown, Ian G.; Bhatia, C. Singh; Silva, S. R. P.; Robertson, John

• Book ID: 120068196
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 391 KB
• Volume: 68
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.116530