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Amorphous Si/insulator multilayers grown by vacuum deposition and electron cyclotron resonance plasma treatment

✍ Scribed by J.-M Baribeau; D.J Lockwood; Z.H Lu; H.J Labbé; S.J Rolfe; G.I Sproule


Book ID
108344814
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
103 KB
Volume
80
Category
Article
ISSN
0022-2313

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