✦ LIBER ✦
Growth and characterization of thin SiN films grown on Si by electron cyclotron resonance nitrogen plasma treatment
✍ Scribed by Jong Moon; Toshimichi Ito; Akio Hiraki
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 677 KB
- Volume
- 229
- Category
- Article
- ISSN
- 0040-6090
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