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Aluminium nitride films prepared by reactive magnetron sputtering

✍ Scribed by Muhl, S; Zapien, J A; Mendez, J M; Andrade, E

Book ID: 118176643
Publisher: Institute of Physics
Year: 1997
Tongue: English
Weight: 203 KB
Volume: 30
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/30/15/005

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