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AlGaN/GaN metal-oxide semiconductor heterostructure field-effect transistor with photo-chemical-vapor deposition SiO2gate oxide

✍ Scribed by C. K. Wang; Y. Z. Chiou; S. J. Chang; Y. K. Su; B. R. Huang; T. K. Lin; S. C. Chen


Book ID
107453032
Publisher
Springer US
Year
2003
Tongue
English
Weight
167 KB
Volume
32
Category
Article
ISSN
0361-5235

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Fabrication of AlGaN/GaN double-insulato
✍ Balachander, Krishnan ;Arulkumaran, Subramaniam ;Sano, Y. ;Egawa, Takashi ;Baska πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 164 KB

## Abstract We report on the fabrication of AlGaN/GaN double‐insulator MOSHEMTs using SiO~2~ and SiN as the prime gate insulators. Both the dielectrics showed enhanced saturation current density and pinch‐off voltage compared to conventional HEMTs. The SiO~2~/SiN/AlGaN/GaN MOSHEMTs exhibited a low