Advances in high κ gate dielectrics for Si and III–V semiconductors

✍ Scribed by J. Kwo; M. Hong; B. Busch; D.A. Muller; Y.J. Chabal; A.R. Kortan; J.P. Mannaerts; B. Yang; P. Ye; H. Gossmann; A.M. Sergent; K.K. Ng; J. Bude; W.H. Schulte; E. Garfunkel; T. Gustafsson

• Book ID: 108341814
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 445 KB
• Volume: 251
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(02)02192-9