✦ LIBER ✦
The Role of Nitrogen on Charge-Trapping-Induced Vth Instability in HfAlON High-κ Gate Dielectric With Metal and Poly-Si Gate Electrodes
✍ Scribed by Xiongfei Yu; Mingbin Yu; Chunxiang Zhu
- Book ID
- 114618836
- Publisher
- IEEE
- Year
- 2007
- Tongue
- English
- Weight
- 234 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0018-9383
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