✦ LIBER ✦

A universal ion implantation model for all species into single-crystal silicon

✍ Scribed by Yang Chen; Geng Wang; Di Li; Oak, S.K.; Shrivastav, G.; Rubin, L.; Tasch, A.F.; Banerjee, S.K.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

An Analytical 1-D Model for Ion Implanta

✍ G. Shrivastav; D. Li; Y. Chen; G. Wang; L. Lin; S. Oak; A.F. Tasch; S.K. Banerje 📂 Article 📅 2002 🏛 Springer 🌐 English ⚖ 517 KB

An accurate and computationally efficien

✍ Shyh-Horng Yang; Steven J. Morris; David L. Lim; Al F. Tasch; Robert B. Simonton 📂 Article 📅 1994 🏛 Springer US 🌐 English ⚖ 859 KB

Dose-rate and temperature dependent stat

✍ J.M. Hernández-Mangas; J. Arias; L.A. Marqués; A. Ruiz-Bueno; L. Bailón 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 294 KB

Ion implantation. II. Investigation of d

📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 162 KB

1109. The degree of substitution of crys

📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 134 KB