✦ LIBER ✦
Ion implantation. II. Investigation of distribution of effective ranges of phosphorus ions implanted into single crystal silicon: A Golanski and R Dybczynski, Nukleonika, 18 (8), 1973, 351–360 (in Polish)
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 162 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0042-207X
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