✦ LIBER ✦
An Analytical 1-D Model for Ion Implantation of Any Species into Single-Crystal Silicon Based on Legendre Polynomials
✍ Scribed by G. Shrivastav; D. Li; Y. Chen; G. Wang; L. Lin; S. Oak; A.F. Tasch; S.K. Banerjee
- Book ID
- 110398924
- Publisher
- Springer
- Year
- 2002
- Tongue
- English
- Weight
- 517 KB
- Volume
- 1
- Category
- Article
- ISSN
- 1569-8025
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