✦ LIBER ✦
An accurate and computationally efficient semi-empirical model for arsenic implants into single-crystal (100) silicon
✍ Scribed by Shyh-Horng Yang; Steven J. Morris; David L. Lim; Al F. Tasch; Robert B. Simonton; Dennis Kamenitsa; Charles Magee; Gayle Lux
- Book ID
- 112811928
- Publisher
- Springer US
- Year
- 1994
- Tongue
- English
- Weight
- 859 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0361-5235
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