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A study of thin film encapsulation on polymer substrate using low temperature hybrid ZnO/Al2O3 layers atomic layer deposition

✍ Scribed by Choi, Dong-won; Kim, Sang-Jun; Lee, Ju Ho; Chung, Kwun-Bum; Park, Jin-Seong

Book ID
121778047
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
931 KB
Volume
12
Category
Article
ISSN
1567-1739

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