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a-SiC:H Films by Remote Hydrogen Microwave Plasma CVD From Ethylsilane Precursors **

✍ Scribed by Wrobel, Aleksander M.; Walkiewicz-Pietrzykowska, Agnieszka; Uznanski, Pawel; Glebocki, Bartosz

Book ID: 120895855
Publisher: John Wiley and Sons
Year: 2013
Tongue: English
Weight: 507 KB
Volume: 19
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.201207046

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