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Amorphous Hydrogenated Silicon Carbide (a-SiC:H) Coatings Produced by Remote Hydrogen Microwave Plasma CVD from Bis(dimethylsilyl)ethane - a Novel Single-Source Precursor

✍ Scribed by Aleksander M. Wróbel; Agnieszka Walkiewicz-Pietrzykowska; Pawel Uznanski; Bartosz Glebocki

Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 259 KB
Volume: 17
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.201104302

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