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A novel sample preparation technique for cross-sectional tem investigation of integrated circuits

✍ Scribed by J. Vanhellemont; H. Bender; C. Claeys; J. Van Landuyt; G. Declerck; S. Amelinckx; R. Van Overstraeten

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 354 KB
Volume: 11
Category: Article
ISSN: 0304-3991
DOI: 10.1016/0304-3991(83)90010-4

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