✦ LIBER ✦

A procedure to prepare cross-sectional samples for TEM

✍ Scribed by Rivaud, Lydia

Publisher: Wiley (John Wiley & Sons)
Year: 1985
Tongue: English
Weight: 319 KB
Volume: 2
Category: Article
ISSN: 0741-0581
DOI: 10.1002/jemt.1060020608

No coin nor oath required. For personal study only.

✦ Synopsis

Cross-sectional transmission electron microscopy (XTEM) is an imaging technique particularly suited to the study of layered structures. For integrated electronic devices it has become a common practice to use XTEM to assess the shape and crystallinity of component layers as well as defect structures introduced by processing. A procedure for preparing samples to be viewed by XTEM is described.

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