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Cross-section TEM sample preparation of multilayer and poorly adhering films

โœ Scribed by Weaver, Louise

Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
232 KB
Volume
36
Category
Article
ISSN
1059-910X

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โœฆ Synopsis

The preparation of TEM cross-section samples from multilayer films or poorly adhering films is discussed in detail in a step-by-step approach designed to enable a competent experimentalist to reproduce the technique. The samples are mounted on an aperture grid and mechanically polished to 2-3 microns in thickness. After ion beam milling for a short period of time (less than 1 hour), a large electron transparent area is obtained. Examples from several thin film systems are discussed.

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