Cross-sectional transmission electron microscopy (XTEM) is an imaging technique particularly suited to the study of layered structures. For integrated electronic devices it has become a common practice to use XTEM to assess the shape and crystallinity of component layers as well as defect structures
A new technique for preparing metal/oxide TEM cross sections
β Scribed by Doychak, J.
- Publisher
- Wiley (John Wiley & Sons)
- Year
- 1989
- Tongue
- English
- Weight
- 290 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0741-0581
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