✦ LIBER ✦
Preparation of cross-sectional TEM samples with observable thin sections at desired regions of non-uniform surfaced semiconducting devices
✍ Scribed by Rai, A. K. ;Rashid, M. H. ;Pronko, P. P. ;Ezis, A. ;Langer, D. W.
- Publisher
- Wiley (John Wiley & Sons)
- Year
- 1987
- Tongue
- English
- Weight
- 495 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0741-0581
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✦ Synopsis
Transmission electron microscopy of cross-sectional samples offers a n attractive means to study process evaluation and failure analysis of many semiconducting devices. In the present work, a technique to prepare cross-sectional TEM samples, containing thin sections of specifically desired regions within nonuniform surfaced Semiconducting devices, is described.