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A method for determining the mass thickness of thin films using electron probe microanalysis

✍ Scribed by Doz. Dr. H.-J. August; J. Wernisch


Book ID
112188155
Publisher
Hindawi Limited
Year
1987
Tongue
English
Weight
881 KB
Volume
9
Category
Article
ISSN
0161-0457

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Application of Monte Carlo method to the
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In the present paper the basic features of Monte Carlo method as applied to the electron probe microanalysis are outlined. In particular, applications to a large variety of experimental situations are reviewed. The problems examined are as follow: i) a binary film on a substrate of a third element;