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A comparative Rutherford backscattering spectrometry and Auger electron spectroscopy depth profile study of Fe-N films

✍ Scribed by H. De Rugy; J.P. Langeron; S. Bouquet; L. Minel; G.I. Grigonov; I.N. Martev


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
80 KB
Volume
161
Category
Article
ISSN
0040-6090

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A comparative study of two techniques to depth proÐle multilayer Ni-Fe alloy coatings has been performed. Both conventional cross-sectioning with energy-dispersive x-ray imaging (EDX) and glow discharge optical emission spectroscopy (GDOES) sputter depth proÐling methods have been compared in terms