Depth Profile Analysis of Multilayer Ni-Fe Alloy Coatings by Glow Discharge Optical Emission Spectroscopy (GDOES) and Energy Dispersive X-ray (EDX) Linescan—a Comparative Study
✍ Scribed by Ives, M.; Lewis, D. B.; Lehmberg, C.
- Publisher
- John Wiley and Sons
- Year
- 1997
- Tongue
- English
- Weight
- 508 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
A comparative study of two techniques to depth proÐle multilayer Ni-Fe alloy coatings has been performed. Both conventional cross-sectioning with energy-dispersive x-ray imaging (EDX) and glow discharge optical emission spectroscopy (GDOES) sputter depth proÐling methods have been compared in terms of analytical accuracy, spatial resolution, ease of use and ultimately overall cost.
The advantages and disadvantages of each technique have been highlighted, and while both methods exhibit good compositional agreement, the GDOES technique o †ers great advantages in turn-around time due to the minimal sample preparation required. Additionally, where the overall coating is thin or individual layers are thin, then the spatial resolution of GDOES is much better than that of EDX.
An objective deÐnition for GDOES spatial resolution has been created based on the optimum resolution obtainable and represents the overall resolution minus the degradation due to crater shape. This is shown to be a factor of approximately four times better than the true spatial resolution, but nonetheless presents a useful baseline guide to what is actually observed.
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