Auger electron spectroscopy and Rutherford backscattering spectroscopy studies of TiN and TiC coatings prepared by the activated reactive evaporation process: N Kaufherr et al, Thin Solid Films, 153, 1987, 149–157

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 293 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90590-3