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10 nm lines and spaces written in HSQ, using electron beam lithography

✍ Scribed by A.E. Grigorescu; M.C. van der Krogt; C.W. Hagen; P. Kruit

Book ID: 104051611
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 533 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.01.022

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10&#xa0;nm lines and spaces written in HSQ, using electron beam lithography

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