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Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor

✍ Scribed by Mikko Ritala; Markku Leskelä

Book ID: 103617536
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 528 KB
Volume: 75
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90180-5

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