Turning to Pb(pta) 2 , it is assumed that the first stage of the complex molecule decomposition involves the elimination of the Hpta molecule, then a consequent removal of the fragments from the residue occurs with the release of lead and carbon in the solid state (Eq. 4). Pb(pta) 2 ! {Pb,C} (s) + Hpta (g) + CO (g) + {COCH . , (CH 3 ) 3 C . , CF 3 . } (g) (4)
In contrast to the solid-phase thermal decomposition, PbF 2 is not formed in this case. This means that the mechanism of Pb(pta) 2 decomposition in the gas phase on the heated surface is different from that in the solid state. We suppose this is also true for other fluorine-containing lead(II) β-diketonates. The formation of carbon in the solid phase is confirmed by evolution of CO 2 in post-annealing of the reactor at the presence of oxygen.
In summary, the data obtained on the film deposition from lead β-diketonates under different conditions, together with the results of the studies of thermal properties of vapors of these compounds, can be used in the development of CVD technologies for lead-containing oxide and metal coatings. Thermal decomposition of vapors of lead(II) complexes with aliphatic β-diketones are expected to form PbO in CVD processes, which is favorable for the preparation of oxide systems, for example, ferroelectrics, high-temperature superconductors, etc. For fluorine-containing lead(II) β-diketonates the formation of metallic Pb is observed even in the presence of oxygen and neither PbO nor PbF 2 are formed on the substrate in sufficient amounts in low-pressure CVD processes.