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Liquid Injection MOCVD of Zirconium Dioxide Using a Novel Mixed Ligand Zirconium Precursor

✍ Scribed by Anthony C. Jones; Timothy J. Leedham; Peter J. Wright; Michael J. Crosbie; Dennis J. Williams; Kirsty A. Fleeting; Hywel O. Davies; David J. Otway; Paul O′Brien

Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
240 KB
Volume
4
Category
Article
ISSN
0948-1907

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