Characterization of ZrOxCyHz thin films deposited by MMP–DECR reactor using Zirconium Tert-Butoxide/O2 mixture

✍ Scribed by Raphaël Cozzolino; Yvan Segui; Patrice Raynaud

• Book ID: 113919508
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 712 KB
• Volume: 205
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2011.04.085