✦ LIBER ✦
Liquid-Injection MOCVD of ZrO2 Thin Films using Zirconium Bis(diethlyamido)-bis(di-tert-butylmalonato) as a Novel Precursor
✍ Scribed by R. Thomas; A. Milanov; R. Bhakta; U. Patil; M. Winter; P. Ehrhart; R. Waser; A. Devi
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 396 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0948-1907
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