✦ LIBER ✦

Y2O3nanosheets as slurry abrasives for chemical-mechanical planarization of copper

✍ Scribed by Xingliang He, Yunyun Chen, Huijia Zhao, Haoming Sun, Xinchun Lu, Hong Liang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electrochemical characterization of copp

✍ Tianbao Du; Dnyanesh Tamboli; Ying Luo; Vimal Desai 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 319 KB

Chemical mechanical planarization of cop

✍ Y. Nagendra Prasad; S. Ramanathan 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 333 KB

Influence of slurry components on unifor

✍ Hyunseop Lee; Boumyoung Park; Haedo Jeong 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 841 KB

Semi-abrasive free slurry with acid coll

✍ Nam-Hoon Kim; Jong-Heun Lim; Sang-Yong Kim; Eui-Goo Chang 📂 Article 📅 2005 🏛 Springer US 🌐 English ⚖ 464 KB

Microelectronic Applications of Chemical

✍ Li, Yuzhuo 📂 Article 📅 2007 🏛 John Wiley & Sons, Inc. ⚖ 440 KB 👁 1 views

Evaluation of advanced chemical mechanic

✍ K.W. Chen; Y.L. Wang; C.P. Liu; Kevin Yang; L. Chang; K.Y. Lo; C.W. Liu 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 153 KB