✦ LIBER ✦

Semi-abrasive free slurry with acid colloidal silica for copper chemical mechanical planarization

✍ Scribed by Nam-Hoon Kim; Jong-Heun Lim; Sang-Yong Kim; Eui-Goo Chang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Chemical mechanical planarization of cop

✍ S. Pandija; D. Roy; S.V. Babu 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 273 KB

Chemical mechanical planarization of cop

✍ Y. Nagendra Prasad; S. Ramanathan 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 333 KB

Y2O3nanosheets as slurry abrasives for c

✍ Xingliang He, Yunyun Chen, Huijia Zhao, Haoming Sun, Xinchun Lu, Hong Liang 📂 Article 📅 2013 🏛 Springer-Verlag 🌐 English ⚖ 611 KB

Nitric acid-based slurry with citric aci

✍ T.C Hu; S.Y Chiu; B.T Dai; M.S Tsai; I.-C Tung; M.S Feng 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 118 KB