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XPS characterization of nitrogen implanted silicon carbide

✍ Scribed by A. Nakao; M. Iwaki; H. Sakairi; K. Terasima

Book ID: 113282560
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 742 KB
Volume: 65
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)95065-y

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