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Oxidation of ion implanted silicon carbide

✍ Scribed by A Makhtari; V Raineri; F La Via; G Franzò; F Frisina; L Calcagno

Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 133 KB
Volume: 4
Category: Article
ISSN: 1369-8001
DOI: 10.1016/s1369-8001(01)00002-6

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