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Enhanced surface hardness in nitrogen-implanted silicon carbide

โœ Scribed by C. Uslu; D.H. Lee; Y. Berta; B. Park; D.B. Poker; L. Riester


Book ID
113287488
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
514 KB
Volume
118
Category
Article
ISSN
0168-583X

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Silicon wafers were implanted with nitrogen by plasma immersion ion implantation (PIII) to alter the surface hydrophilic properties and wettability. Our X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectroscopy (FTIR) and contact angle measurements indicate that the Si-N bonds