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X-Ray Reflectivity Study of the Structural Properties of SiO[sub 2] and SiOF Thin Films

✍ Scribed by Ceriola, Giulio; Iacona, Fabio; La Via, Francesco; Raineri, Vito; Bontempi, Elza; Depero, Laura E.


Book ID
126724145
Publisher
The Electrochemical Society
Year
2001
Tongue
English
Weight
274 KB
Volume
148
Category
Article
ISSN
0013-4651

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