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X-ray reflectivity study of r.f.-sputtered thin SiO2 films

✍ Scribed by A. Bender; Th. Gerber; H. Albrecht; B. Himmel

Book ID: 107864256
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 368 KB
Volume: 229
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90404-d

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