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Electrical properties of R.F.-sputtered SiO2 films

✍ Scribed by J. Santamaría; F. Sánchez Quesada; G. Gonzalez Díaz; E. Iborra; M. Rodriguez Vidal

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 290 KB
Volume: 125
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90236-6

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