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X-ray multiple diffraction in the characterization of TiNO and TiO2 thin films grown on Si(0 0 1)

✍ Scribed by Th. Chiaramonte; E. Abramof; F. Fabreguette; M. Sacilotti; L.P. Cardoso

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 320 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.02.064

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X-ray multiple diffraction in the characterization of TiNO and TiO2 thin films grown on Si(0&#xa0;0&#xa0;1)

X-ray multiple diffraction in the characterization of TiNO and TiO2 thin films grown on Si(0 0 1)