X-ray fluorescence analysis of multiple-layer films

✍ Scribed by M. Mantler

• Book ID: 104100362
• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 600 KB
• Volume: 188
• Category: Article
• ISSN: 0003-2670
• DOI: 10.1016/s0003-2670(00)86026-2

✦ Synopsis

Theoretical equations for fluorescent count rates from bulks, single-layer films, and multiple-layer film specimens, based on fundamental parameter models, are developed. Absorption and secondary enhancement within each layer, between layers, and between layers and substrate are considered. A computer program is used to predict count rates as well as for simultaneous back-calculation of concentrations and thicknesses. Standards can be bulks, single films, or multiple films in any combination; pure-element standards as well as those containing additional elements are suitable. Evaluation of experimental data from two-and three-layer films (by using bulk pure-element standards) by the proposed method shows agreement within <O.B%(absolute) for concentrations and <5%(relative) for thicknesses compared to results from single-layer reference specimens prepared under identical conditions.