✦ LIBER ✦

Wavelength considerations in soft-x-ray projection lithography

✍ Scribed by Hawryluk, Andrew M. ;Ceglio, Natale M.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Soft x-ray projection lithography

✍ Bjorkholm, J. E.; Bokor, J.; Eichner, L.; Freeman, R. R.; Mansfield, W. M.; Szet 📂 Article 📅 1991 🏛 Optical Society of America 🌐 English ⚖ 657 KB

Power loading limitations in soft x-ray

✍ A.M. Hawryluk; N.M. Ceglio 📂 Article 📅 1994 🏛 IOS Press 🌐 English ⚖ 812 KB

Experiments in projection lithography us

✍ J.E. Bjorkholm; J. Bokor; L. Eichner; R.R. Freeman; J. Gregus; T.E. Jewell; W.M. 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 746 KB

Front-end design issues in soft-x-ray pr

✍ Ceglio, Natale M. ;Hawryluk, Andrew M. ;Sommargren, Gary E. 📂 Article 📅 1993 🏛 The Optical Society 🌐 English ⚖ 918 KB

Soft-x-ray projection lithography experi

✍ Tichenor, D. A. ;Kubiak, G. D. ;Malinowski, M. E. ;Stulen, R. H. ;Haney, S. J. ; 📂 Article 📅 1993 🏛 The Optical Society 🌐 English ⚖ 770 KB

Wafer cost analysis for a Soft X-Ray Pro

✍ N.M. Ceglio; A.M. Hawryluk 📂 Article 📅 1992 🏛 IOS Press 🌐 English ⚖ 811 KB