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Experiments in projection lithography using soft x-rays

✍ Scribed by J.E. Bjorkholm; J. Bokor; L. Eichner; R.R. Freeman; J. Gregus; T.E. Jewell; W.M. Mansfield; A.A. MacDowell; M.L. O'Malley; E.L. Raab; W.T. Silfvast; L.H. Szeto; D.M. Tennant; W.K. Waskiewicz; D.L. White; D.L. Windt; O.R. Wood II

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 746 KB
Volume: 13
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(91)90085-r

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