Soft x-ray projection lithography

✍ Scribed by Bjorkholm, J. E.; Bokor, J.; Eichner, L.; Freeman, R. R.; Mansfield, W. M.; Szeto, L.; Taylor, D. W.; Tennant, D. M.; Wood II, O. R.; Jewell, T. E.

• Book ID: 115436138
• Publisher: Optical Society of America
• Year: 1991
• Tongue: English
• Weight: 657 KB
• Volume: 2
• Category: Article
• ISSN: 1047-6938
• DOI: 10.1364/OPN.2.5.000027