๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Waveguide Perturbation Techniques in Microwave Semiconductor Diagnostics

โœ Scribed by Champlin, K.S.; Armstrong, D.B.

Book ID
117925149
Publisher
IEEE
Year
1963
Tongue
English
Weight
528 KB
Volume
11
Category
Article
ISSN
0018-9480

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## Abstract We report on the optoโ€microwave characterization of InP waveguideโ€coupled to microcavity disk resonators. The lateral waveguide confinement is obtained by deep inductivelyโ€coupled plasma reactiveโ€ion etching (ICPโ€RIE) through the guiding layer. We demonstrate the propagation of microwav