Characterization of InP semiconductor waveguides coupled to disk microcavity optical resonators via opto-microwave technique
✍ Scribed by P. Miska; M. Beaugeois; C. Lethien; A. Beaurain; H.-W. Li; J.-P. Vilcot; D. Decoster; J. Chazelas; M. Bouazaoui; L. Dobrzynski; A. Akjouj; B. Djafari-Rouhani; J.-O. Vasseur
- Publisher
- John Wiley and Sons
- Year
- 2005
- Tongue
- English
- Weight
- 78 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0895-2477
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✦ Synopsis
Abstract
We report on the opto‐microwave characterization of InP waveguide‐coupled to microcavity disk resonators. The lateral waveguide confinement is obtained by deep inductively‐coupled plasma reactive‐ion etching (ICP‐RIE) through the guiding layer. We demonstrate the propagation of microwaves on an optical carrier in this resonant structure, which behaves as an opto‐microwave filter or demultiplexer. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 45: 315–317, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.20808