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VHF SiH4/H2 plasma characteristics with negative ions

✍ Scribed by Yamane, Tsukasa; Nakao, Sachiko; Takeuchi, Yoshiaki; Yamauchi, Yasuhiro; Takatsuka, Hiromu; Muta, Hiroshi; Uchino, Kiichiro; Kawai, Yoshinobu

Book ID: 123585422
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 458 KB
Volume: 228
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2012.05.036

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