Time-resolved cavity ringdown spectroscopy on nanoparticle generation in a SiH4–H2 VHF plasma

✍ Scribed by Takehiko Nagai; Arno H.M. Smets; Michio Kondo

• Book ID: 116670859
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 179 KB
• Volume: 354
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2007.09.009