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Characteristics of VHF H2 Plasma Produced at High Pressure

✍ Scribed by Y. Yamauchi; Y. Takeuchi; H. Takatsuka; H. Yamashita; H. Muta; Y. Kawai

Book ID
102130033
Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
139 KB
Volume
48
Category
Article
ISSN
0005-8025

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Large area SiH4/H2 VHF plasma produced a
Large area SiH4/H2 VHF plasma produced at high pressure using multi-rod electrode
✍ Yasuhiro Yamauchi; Yoshiaki Takeuchi; Hiromu Takatsuka; Yuichi Kai; Hiroshi Muta πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 521 KB

A VHF SiH 4 /H 2 plasma was produced using a multi-rod electrode of 1200 mm Γ— 115 mm and the characteristics of VHF plasma at high pressure were measured with a heated Langmuir probe, where the frequency of VHF power source was 60 MHz and the power was up to 450 W. The pressure was ranged from 1 Tor